Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2008-09-30
2008-09-30
Moore, Karla (Department: 1792)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C118S726000
Reexamination Certificate
active
10152697
ABSTRACT:
A successive vapor deposition system in which a vapor deposition material is heated, vaporized in a vacuum, and deposited onto a vapor deposition area of a substrate, includes a conveyer which conveys the substrate in a conveying direction parallel to a plane on which the substrate lies, wherein the vapor deposition area faces downward and is exposed through the underside of the conveyer; a plurality of vapor deposition chambers aligned in the conveying direction, each the vapor deposition chamber including a space through which the substrate is conveyed; at least one container positioned in each of the plurality of vapor deposition chambers below the plane on which the substrate lies, and containing the vapor deposition material, wherein a width of the container covers the vapor deposition area in a direction perpendicular to the conveying direction; and a heating medium provided for the container.
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Translation of Written Decision of Patent Application, Intellectual Property Office, Ministry of Economic Affairs for Filing No. 9110680.
Copy of Search Report for EP 02 01 1347 dated Sep. 6, 2002.
Translation of Written Decision of Patent Application, Intellectual Property Office, Ministry of Economic Affairs for Filing No. 9110680, No Date.
Kido Junji
Mizukami Tokio
International Manufacturing and Engineering Services Co., Ltd.
Kido Junji
McCormick Paulding & Huber LLP
Moore Karla
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