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Sputter device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Sputter enhanced ion implantation process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter etching apparatus with plasma source having a dielectric

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter etching chamber having a gas baffle with improved unifor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter etching chamber with improved uniformity

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputter source, sputtering device, and sputtering method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter target and method of using a sputter target

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputter target based on titanium dioxide

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter targets with expansion grooves for reduced separation

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter textured magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter-coating target and method of use

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputter-CVD process for at least partially coating a workpiece

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtered films of bismuth/tin oxide

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtered films of metal alloy oxides and method of preparation

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtered indium oxide films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtered mask defined with highly selective side wall chemical

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Sputtered multilayer magnetic recording media with...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputtering alloy films using a crescent-shaped aperture

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputtering alloy films using a sintered metal composite target

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputtering alloy target and method of producing an alloy film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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