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Method for minimizing substrate to clamp sticking during thermal

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for monitoring etching processes

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for operating a sputter cathode with a target

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for planarization of submicron vias and the manufacture o

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for plasma - coating a semiconductor body

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for plasma etching at a high etch rate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for plasma ignition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for plasma ignition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for plasma-enhanced physical vapor deposition of...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing a magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing a magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing a magneto optic memory

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing a shield to reduce particles in a physical

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing a shield to reduce particles in a physical

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing alumna coating film having alpha-type...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing an optical thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing basal oriented molybdenum disulfide (MoS.su

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing high density magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing one dimensional spin photonic crystal...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for preparing thin film electro-luminescence element

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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