Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1993-04-28
1994-03-15
Pianalto, Bernard
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
427128, 427130, 427131, 427132, 427380, 4273897, 427404, 4274193, C23C 1400
Patent
active
052943127
ABSTRACT:
A method for preparing a magnetic recording medium includes the steps of providing a substrate, providing an alloy composite target attaching thereon Co and Fe pellets to modify the composition of this magnetic recording medium, and utilizing the target to form a (Co,Mn) modified .gamma.-Fe.sub.2 O.sub.3 thin film on the substrate under controlled conditions. Such method can provide a magnetic recording medium which is cost-effective and has a better SNR, a better resistance to corrosion and a high coercivity.
REFERENCES:
Os-doped .gamma.-Fe.sub.2 O.sub.3 thin films having coercivity and high coercive squareness; O. Ishii et al; J. Appln. Phys. 55 (6) Mar. 15, 1984 pp. 2269-2271.
Formation of Ferrite Thin Films by Vacuum Evaporation with Annealing Process M. Satou et al; IEEE Transactions on Magnetics vol. MAG-13, No. 5, Sep. 1977, pp. 1400-1402.
Magnetic Recording Characteristics of Sputtered .gamma.-Fe.sub.2 O.sub.3 Thin Film Disks; S. Hattori et al IEEE Transactions on Magnetics, vol. MAG-15, Nov. 6, 1979, pp. 1549-1551.
New preparation process for sputtered .gamma.-Fe.sub.2 O.sub.3 thin film disks Y. Ishii et al; IEEE Transactions on Magentics, vol. MAG-16, No. 5, Sep.; pp. 1114-1116.
Preparation of thin films in the system .gamma.Fe.sub.2 O.sub.3 -Fe.sub.2 3 for recording media by spray pyrolysis of organometallic solutions using an ultrasonic pump; Michel Langlet et al; IEEE Transactions on Magnetics, vol. MAG-22, No. 3, May 1986, pp. 151-156.
Roadmap for 10 Gbit/in.sup.2 Media: Challenges; Edward S. Murdock et al IEEE Transactions on Magnetics, vol. 28, No. 5, Sep. 1992, pp. 3078-3083.
Chang Wei-Der
Chin Tsung-Shune
Deng Ming-Cheng
National Science Council
Pianalto Bernard
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