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Method and apparatus for manufacturing flexible organic EL...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for metal allot sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for microwave assisting sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for milling copper interconnects in a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for monitoring optical characteristics...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for monitoring plasma processing...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for multi-stage sputter deposition of...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for multi-target sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for multilayer film deposition...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for performing high pressure physical...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for periodic polarity reversal during an ac

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for physical-vapor deposition of material l

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for planar magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for preventing arcing in sputter chamber

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for processing a semiconductor wafer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for producing a magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for producing a substrate with low secondar

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for producing a uniform density plasma...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for producing an optically effective...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for producing uniform isotropic...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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