Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1989-07-12
1991-03-05
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20429806, C23C 1434
Patent
active
049975390
ABSTRACT:
A method for producing a magnetic recording medium, which comprises forming, by sputtering, a thin undercoating layer and a thin cobalt alloy magnetic layer sequentially on a substrate, wherein an intermediate electrode is provided in the vicinity of the target to enclose at least 1/2 of the circumference of the sputter erosion end of the target, and at least one of the undercoating layer and the cobalt alloy magnetic layer is formed under such condition that a positive potential relative to the substrate and the grounded portion of the main body of the layer-forming apparatus, is applied to the intermediate electrode.
REFERENCES:
patent: 3410775 (1968-11-01), Vratny
patent: 4094764 (1978-06-01), Boucher et al.
patent: 4412907 (1983-11-01), Ito et al.
patent: 4427524 (1984-01-01), Crombeen et al.
patent: 4784739 (1988-11-01), Kadokura et al.
IBM Tech. Disc. Bull., vol. 12, No. 11, Apr. 1970, p. 1809.
Solid State Technology/Mar., 1988, pp. 106-112.
Ichikawa Masatoshi
Komizo Kazunaga
Sakuma Takeshi
Yamaguchi Yukio
Yokoyama Fumiaki
Mitsubishi Kasei Corporation
Weisstuch Aaron
LandOfFree
Method and apparatus for producing a magnetic recording medium does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for producing a magnetic recording medium, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for producing a magnetic recording medium will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-494693