Microwave plasma deposition source and method of filling high as
Microwave plasma processing process and apparatus
Minute high-performance rare earth magnet for micromini...
Mode size converter for a planar waveguide
Modification and selection of the magnetic properties of magneti
Modification of in-plate refractory metal texture by use of...
Modified electrical properties of sputtered thermal coatings
Modular deposition system having batch processing and serial thi
Modular sputtering apparatus
Monolithic frequency selective limiter fabrication
Moving magnetic/cathode arrangement and method
Multi-chamber integrated process system
Multi-layer deposition process using four ring sputter sources
Multi-layer reactive sputtering method with reduced...
Multi-layer sputter deposition apparatus
Multi-phase overcoats for magnetic discs
Multi-planar angulated sputtering target and method of use for f
Multi-step magnetron sputtering process
Multi-step process for depositing copper seed layer in a via
Multi-track magnetron exhibiting more uniform deposition and...