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Microwave plasma deposition source and method of filling high as

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Microwave plasma processing process and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Minute high-performance rare earth magnet for micromini...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Mode size converter for a planar waveguide

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Modification and selection of the magnetic properties of magneti

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Modification of in-plate refractory metal texture by use of...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Modified electrical properties of sputtered thermal coatings

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Modular deposition system having batch processing and serial thi

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Modular sputtering apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Monolithic frequency selective limiter fabrication

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Moving magnetic/cathode arrangement and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-chamber integrated process system

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-layer deposition process using four ring sputter sources

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-layer reactive sputtering method with reduced...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-layer sputter deposition apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-phase overcoats for magnetic discs

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-planar angulated sputtering target and method of use for f

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-step magnetron sputtering process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-step process for depositing copper seed layer in a via

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Multi-track magnetron exhibiting more uniform deposition and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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