Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1995-10-02
1998-07-28
Breneman, R. Bruce
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 2041922, 427131, C23C 1434
Patent
active
057858250
ABSTRACT:
A magnetic disc for use in a magnetic disc drive is provided. The magnetic disc includes a recording surface wherein the recording surface includes a dual phase carbon overcoat. The dual phase carbon overcoat includes an amorphous carbon film sputtered on a magnetic layer. A doped amorphous carbon film is sputtered on the amorphous carbon film. The dual phase carbon overcoat has demonstrated improved hardness, reduced stiction and superior corrosion resistance over the prior art. A method of manufacturing the magnetic disc is also provided. The method includes providing a sputtering apparatus having a process chamber, providing a partially manufactured magnetic disc having a magnetic layer thereon, placing the partially manufactured magnetic disc within the process chamber, sputtering an amorphous carbon film on the magnetic layer, and sputtering a doped amorphous carbon film on the amorphous carbon film. The process reduces throughput inefficiencies due to down time cleaning and avoids carbon induced damage to the discs.
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Chen Xiaohua
Hafid Abdellah
Hwang Kuo-Hsing
Khazanov Alexander Boris
Nguyen Quy Cuu
Breneman R. Bruce
McDonald Rodney G.
Seagate Technology Inc.
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