Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2005-04-26
2005-04-26
Versteeg, Steven (Department: 1753)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C427S248100, C427S259000, C427S282000
Reexamination Certificate
active
06884327
ABSTRACT:
A process for forming a mode size converter with an out-of-plane taper formed during deposition with a shadow mask is disclosed. Mode-size converters according to the present invention can have any number of configurations. Measured coupling efficiencies for waveguides with mode size converters according to the present invention show marked improvement.
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English translation for JP 7-224379.*
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Chen Yu
Demaray Richard E.
Pan Tao
Pethe Rajiv
Xie Yong Jin
Finnegan Henderson Farabow Garrett & Dunner
Versteeg Steven
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