Alternating current rotatable sputter cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Reexamination Certificate

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Details

C204S298200, C204S298210, C204S298220

Reexamination Certificate

active

10755183

ABSTRACT:
The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.

REFERENCES:
patent: 4166018 (1979-08-01), Chapin
patent: 4356073 (1982-10-01), McKelvey
patent: 4422916 (1983-12-01), McKelvey
patent: 4443318 (1984-04-01), McKelvey
patent: 4445997 (1984-05-01), McKelvey
patent: 4461689 (1984-07-01), Diepers
patent: 4466877 (1984-08-01), McKelvey
patent: 5047131 (1991-09-01), Wolfe
patent: 5096562 (1992-03-01), Boozenny et al.
patent: 5100527 (1992-03-01), Stevenson
patent: 5188717 (1993-02-01), Broadbent et al.
patent: 5200049 (1993-04-01), Stevenson et al.
patent: 5345129 (1994-09-01), Molnar
patent: 5445721 (1995-08-01), Lehan et al.
patent: 5470452 (1995-11-01), Dickey et al.
patent: 5512164 (1996-04-01), Timberlake
patent: 5561336 (1996-10-01), Girardin
patent: 5567289 (1996-10-01), Taylor
patent: 5661353 (1997-08-01), Erdman et al.
patent: 5814195 (1998-09-01), Lehan et al.
patent: 6328856 (2001-12-01), Brucker
patent: 6365010 (2002-04-01), Hollars
patent: 2002/0189939 (2002-12-01), German
patent: 2003/0099416 (2003-05-01), Kinno et al.
patent: 2003/0136672 (2003-07-01), Barrett
patent: 2005/0178662 (2005-08-01), Wurczinger
patent: 2005/0224343 (2005-10-01), Newcomb et al.
patent: 1584707 (2005-10-01), None
patent: 01-215975 (1989-08-01), None
patent: 01305523 (1989-12-01), None
patent: 2002220667 (2002-08-01), None

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