Acoustic delay line with movable partition plates

Adaptive X-ray lithography mask

Alignment apparatus

Alignment apparatus and SOR x-ray exposure apparatus having same

Alignment apparatus and SOR X-ray exposure apparatus having same

Apparatus and methods for detecting position of an object...

Apparatus for acceleration and application of negative ions and

Apparatus for effecting alignment and spacing control of a mask

Apparatus for semiconductor lithography

Arrangement for exposing semiconductor wafers by means of a sync

Attenuated phase-shifted reticle using sub-resolution pattern

Bistable aligner cartridge foot

Coated material and X-ray exposure mask

Collimator for x-ray proximity lithography

Compact high-intensity pulsed x-ray source, particularly for lit

Condenser for illuminating a ring field

Deformation free X-ray exposure mask for X-ray lithography

Device fabrication entailing plasma-derived x-ray delineation

Device for manipulating a synchrotron beam bundle

Device for producing X-ray images on objects composed of photo o