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Deformation free X-ray exposure mask for X-ray lithography

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Device fabrication entailing plasma-derived x-ray delineation

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Device for manipulating a synchrotron beam bundle

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Device for producing X-ray images on objects composed of photo o

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Device for x-ray lithography

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Diamond membranes for X-ray lithography

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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