Device for producing X-ray images on objects composed of photo o

Details Device for producing X-ray images on objects composed of photo o Device for producing X-ray images on objects composed of photo o

1993-01-27

1994-04-26

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 35, 378147, G21K 500

Patent

active

053073940

ABSTRACT:
A device for forming an X-ray image in objects composed of a photo or an X-ray sensitive material has a plurality of layers each having X-ray non-transmitting areas and X-ray transmitting areas, each of the areas of each of the layers having transverse sizes corresponding to respective transverse sizes of openings to be formed or an image of partitions between the openings, the X-ray non-transmitting areas of each layer which form the image of partitions between the openings being located at an angle from zero to 89.99.degree. relative to a central beam of an exposing radiation, the layers having a height such as to provide a ratio of its height not less than 1 with respect to a distance between the layers.

REFERENCES:
patent: 4329410 (1982-05-01), Buckley
patent: 4827138 (1989-05-01), Randall
patent: 4868093 (1989-09-01), Levy
patent: 4951305 (1990-08-01), Moore et al.
patent: 5135609 (1992-08-01), Rease et al.

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