4. X-ray or gamma ray systems or devices
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Coated material and X-ray exposure mask

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Collimator for x-ray proximity lithography

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Compact high-intensity pulsed x-ray source, particularly for lit

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Condenser for illuminating a ring field

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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