Condenser for illuminating a ring field

Details Condenser for illuminating a ring field Condenser for illuminating a ring field

1993-05-11

1994-11-01

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 85, 359851, 359861, G21K 106

Patent

active

053612922

ABSTRACT:
A series of segments of a parent aspheric mirror having one foci at at a si-point source of radiation and the other foci at the radius of a ring field have all but one or all of their beams translated and rotated by sets of mirrors such that all of the beams pass through the real entrance pupil of a ring field camera about one of the beams and fall onto the ring field radius as a coincident image as an arc of the ring field.

REFERENCES:
patent: 4861148 (1989-08-01), Sato et al.
patent: 5063586 (1991-11-01), Jewell et al.
patent: 5107526 (1992-04-01), Hoover
patent: 5131023 (1992-07-01), Yasugaki et al.
patent: 5136413 (1992-08-01), MacDonald et al.
patent: 5153898 (1992-10-01), Suzuki et al.

Affiliated with

Also associated with

Rating

Condenser for illuminating a ring field does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Condenser for illuminating a ring field, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Condenser for illuminating a ring field will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1807062