X-ray or gamma ray systems or devices – Specific application – Lithography
Patent
1990-10-31
1991-12-17
Fields, Carolyn E.
X-ray or gamma ray systems or devices
Specific application
Lithography
378119, 378 65, 328233, 328235, H05H 1304
Patent
active
050739131
ABSTRACT:
An apparatus for generating X-rays from electron synchrotron radiation or beams of accelerated ions for ion radiography or ion therapy includes a source of electrons and a source of ions, both of which are connectable to preaccelerators. The preaccelerators supply the appropriate type of charged particle to a synchrotron accelerator which accelerates ions to an energy level that is appropriate for radiography or therapy and which accelerates electrons to a level that generates X-rays by synchrotron radiation in a useful frequency range. The accelerator system also includes a storage ring into which particles are switched and circulated for later use. Electrons are extracted from the synchrotron and injected into the storage ring by fast extraction using a kicker magnet and a septum magnet. They then circulate in the storage ring for periods of hours generating X-rays which may be used for lithography of computer chips with submicron resolution. The energy loss because of this radiation is continuously replaced by a radio-frequency acceleration system. During the period that electrons are circulating in the storage ring, the synchrotron may be utilized to accelerate ions for ion radiography or ion therapy with beam extracted from the synchrotron by stripping extraction through thin foils. Other simultaneous uses for the ions or electrons from the preaccelerator may prove advantageous.
REFERENCES:
patent: 3328708 (1967-06-01), Smith et al.
patent: 3344435 (1967-09-01), Blewett
patent: 3986026 (1976-10-01), Martin
patent: 4780683 (1988-10-01), Nakata
patent: 4992746 (1991-02-01), Martin
ACCTEK Associates, Inc.
Fields Carolyn E.
Porta David P.
LandOfFree
Apparatus for acceleration and application of negative ions and does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for acceleration and application of negative ions and , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for acceleration and application of negative ions and will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-839244