Epitaxial silicon wafers substantially free of grown-in defects
Epitaxial system
Epitaxial wafer and a method for manufacturing the same
Epitaxial wafer and method for producing epitaxial wafers
Epitaxial wafer substantially free of grown-in defects
Epitaxial-wafer fabricating process
Epitaxially coated semiconductor wafer and process for...
Epitaxially coated semiconductor wafers having low-oxygen zone o
Epitaxially coated silicon wafer and method for producing...
Epitaxy layer and method of forming the same
Epitaxy with compliant layers of group-V species
Epitaxy with reusable template
Equipment and method for manufacturing silicon carbide...
Equipment for producing silicon single crystals
Esrf source for ion plating epitaxial deposition
Etch process for single crystal silicon
Etch selectivity enhancement for tunable etch resistant...
Etch stop layer system
Etch stop layer system
Evaluation process of reactivity of silica glass with...