Epitaxy with reusable template

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having moving solid-liquid-solid region

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Details

117922, C30B 2504

Patent

active

056393008

ABSTRACT:
A template having a surface relief structure contacts a thin crystalline film on a substrate to align the film in accordance with the surface relief structure.

REFERENCES:
patent: 4333792 (1982-06-01), Smith
patent: 4475980 (1984-10-01), Rhemer et al.
patent: 4479846 (1984-10-01), Smith et al.
patent: 4534820 (1985-08-01), Mori et al.
patent: 4565599 (1986-01-01), Geis et al.
Fan et al., "Graphite-Strip-Heater Zone-Melting Recrystallization of Si Films", J. Crys. Growth 63(1983) 453-483.

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