4. Semiconductor device manufacturing: process
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Tungsten plug corrosion prevention method using gas sparged...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten plug corrosion prevention method using ionized air

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten plug corrosion prevention method using water

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten plug formation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten plug with conductor capping layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten plugs for integrated circuits and methods for making sa

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten silicide barrier for nickel silicidation of a gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten silicide deposition process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten silicide etch process with reduced etch rate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Tungsten silicide nitride as a barrier for high temperature...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten silicide/ tungsten polycide anisotropic dry etch proces

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Tungsten-doped indium oxide structures and methods

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten-filled deep trenches

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tungsten-nitride for contact barrier application

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Tuning absorption levels during laser thermal annealing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Tuning of photo-absorption materials through use of magnetic...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Tuning substrate/resist contrast to maximize defect...

Semiconductor device manufacturing: process – With measuring or testing
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Tunnel dielectric comprising nitrogen for use with a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Tunnel diode layout for an EEPROM cell for protecting the...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Tunnel insulating layer of flash memory device and method of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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