Tungsten plug corrosion prevention method using ionized air

Details Tungsten plug corrosion prevention method using ionized air Tungsten plug corrosion prevention method using ionized air

2006-05-30

2006-05-30

Thai, Luan (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S672000, C438S620000

Reexamination Certificate

active

07052992

ABSTRACT:
Disclosed herein is a method of making integrated circuits. In one embodiment the method includes forming tungsten plugs in the integrated circuit and forming electrically conductive interconnect lines in the integrated circuit after formation of the tungsten plugs. At least one tungsten plug is electrically connected to at least one electrically conductive interconnect line. Thereafter at least one electrically conductive interconnect line is exposed to ionized air.

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