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Trench DMOS transistor with embedded trench schottky rectifier

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench DRAM cell with vertical device and buried word lines

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench DRAM cell with vertical device and buried word lines

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench DRAM cell with vertical device and buried word lines

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench edge rounding method and structure for trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Patent

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Trench etch process for low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Trench etch with incremental oxygen flow

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench etching in an integrated-circuit semiconductor device

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having air-gap dielectric
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Trench FET with improved body to gate alignment

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench field effect transistor with reduced punch-through suscep

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench fill process for reducing stress in shallow trench...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Trench fill with HDP-CVD process including coupled high...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Trench filling method employing oxygen densified gap filling CVD

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Trench filling method employing oxygen densified gap filling sil

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Trench filling method employing silicon liner layer and gap fill

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Patent

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Trench filling process for preventing formation of voids in...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Trench formation in a semiconductor material

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Trench formation in semiconductor integrated circuits (ICs)

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Trench forming process and integrated circuit device including a

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Trench free polysilicon gate definition process for a non-volati

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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