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Self-aligned contact process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Self-aligned contact process comprising a two-layer spacer where

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process for a crown shaped dynamic...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process for semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contact process implementing bias compensation...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-aligned contact process in semiconductor fabrication

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contact process using a poly-cap mask

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process using low density/low k dielectric

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contact process using silicon spacers

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contact process using stacked spacers

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structure

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-aligned contact structure and method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structure and process for forming...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structure with raised source and drain

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structures using high selectivity etching

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Self-aligned contact window

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned contact wiring process for SI devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned contacts for salicided MOS devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned contacts for semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-aligned contacts for semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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