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Sacrificial multilayer anti-reflective coating for mos gate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Sacrificial nitride and gate replacement

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sacrificial oxide for minimizing box undercut in damascene...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Sacrificial polysilicon sidewall process and rapid thermal...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sacrificial polysilicon sidewall process and rapid thermal...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sacrificial protective layer for image sensors and method of...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Sacrificial self aligned spacer layer ion implant mask...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sacrificial silicon sidewall for damascene gate formation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sacrificial spacer layer method for fabricating field effect...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sacrificial stop layer and endpoint for metal CMP

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Sacrificial TiN arc layer for increased pad etch throughput

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Safe arsenic gas phase doping

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Salicide block for silicon-on-insulator (SOI) applications

Semiconductor device manufacturing: process – Making passive device – Resistor
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Salicide device with borderless contact

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Salicide field effect transistors with improved borderless...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Salicide formation method

Semiconductor device manufacturing: process – Forming schottky junction – Using refractory group metal
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Salicide formation on narrow poly lines by pulling back of space

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Salicide formation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Salicide formation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Salicide integrated solution for embedded virtual-ground memory

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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