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Deep trench bottle-shaped etching using Cl2 gas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Deep trench capacitor and method of fabricating the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Deep trench capacitor having increased surface area

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Deep trench capacitor through SOI substrate and methods of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Deep trench capacitor with buried plate electrode and...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Deep trench cell capacitor with inverting counter electrode

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Deep trench device with single sided connecting structure...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Deep trench dram process on SOI for low leakage DRAM cell

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Deep trench etch on bonded silicon wafer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Deep trench filling method using silicon film deposition and sil

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Deep trench formation in semiconductor device fabrication

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench isolation for reducing soft errors in integrated...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Deep trench isolation for thyristor-based semiconductor device

Semiconductor device manufacturing: process – Making regenerative-type switching device – Having field effect structure
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Deep trench isolation for thyristor-based semiconductor device

Semiconductor device manufacturing: process – Making regenerative-type switching device – Having field effect structure
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Deep trench isolation of embedded DRAM for improved latch-up...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Deep trench self-alignment process for an active area of a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench structure manufacturing process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Deep trench with enhanced sidewall surface area

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Deep UV anti-reflection coating etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Deep-trench capacitor with hemispherical grain silicon...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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