Ultra-shallow junction formation by novel process sequence...
Ultra-shallow junction formation for deep sub-micron...
Ultra-shallow p-type junction having reduced sheet resistance an
Ultra-shallow semiconductor junction formation
Ultra-short channel recessed gate MOSFET with a buried contact
Ultra-short transistor fabrication scheme for enhanced reliabili
Ultra-thin body SOI MOSFET and gate-last fabrication method
Ultra-thin channel device with raised source and drain and...
Ultra-thin fully depleted SOI device and method of fabrication
Ultra-thin gate dielectrics
Ultra-thin gate oxide through post decoupled plasma...
Ultra-thin Si channel CMOS with improved series resistance
Ultra-thin silicon-on-insulator and...
Ultra-thin SOI MOSFET method and structure
Ultraviolet blocking layer
Undercut and residual spacer prevention for dual stressed...
Uniaxial strain relaxation of biaxial-strained thin films...
Uniform dielectric layer and method to form same
Uniformly doped source/drain junction in a double-gate MOSFET
Unit cell layout and transfer gate design for high density DRAMs