Dry etch process for small-geometry metal gates over thin...

Dry etchback of interconnect contacts

Dry etching method

Dry etching method for semiconductor device

Dry etching procedure and recipe for patterning of thin film cop

Dry low k film application for interlevel dielectric and...

Dry process for cleaning residues/polymers after metal etch

Dual barrier and conductor deposition in a dual damascene...

Dual cap layer in damascene interconnection processes

Dual capillary IC wirebonding

Dual damascence copper process using a selected mask

Dual damascence process utilizing teos-based silicon oxide...

Dual damascence process utilizing teos-based silicon oxide...

Dual damascene

Dual damascene

Dual damascene approach for small geometry dimension

Dual damascene arrangement for metal interconnection with...

Dual damascene CMP process with BPSG reflowed contact hole

Dual damascene copper interconnect to a damascene tungsten...

Dual damascene fabrication with low k materials