H 2 plasma treatment

Hafnium nitride gate dielectric

Halogen addition for improved adhesion of CVD copper to barrier

Hard mask etch for gate polyetch

Hard mask for integrated circuit fabrication

Hardening of copper to improve copper CMP performance

Hardmask gate patterning technique for all transistors using...

HDP treatment for reduced nickel silicide bridging

HDP-CVD apparatus and process for depositing titanium films...

HDP-CVD seasoning process for high power HDP-CVD gapfil to...

Healing detrimental bonds in deposited materials

Heat treating method for thin film and forming method for...

Heat-processing method for semiconductor process under a...

Hermetic seal for silicon die with metal feed through structure

Heterointegration of materials using deposition and bonding

High aspect ratio contact structure for use in integrated...

High aspect ratio contact structure with reduced silicon...

High aspect ratio contact structure with reduced silicon...

High aspect ratio electroplated metal feature and method

High aspect ratio fill method and resulting structure