Dual damascene process

Dual damascene process

Dual damascene process

Dual damascene process

Dual damascene process

Dual damascene process

Dual damascene process and structure with dielectric barrier lay

Dual damascene process flow enabling minimal ULK film...

Dual damascene process flow for a deep sub-micron technology

Dual damascene process for carbon-based low-K materials

Dual damascene process for forming a multi-layer low-k...

Dual damascene process for forming local interconnect

Dual damascene process for manufacturing interconnects

Dual damascene process for multi-level metallization and interco

Dual damascene process to reduce etch barrier thickness

Dual damascene process using a low k interlayer for forming...

Dual damascene process using an oxide liner for a dielectric...

Dual damascene process using high selectivity boundary layers

Dual damascene process using low-dielectric constant materials

Dual damascene process using selective W CVD