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Metal gates with low charge trapping and enhanced dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Metal-germanium physical vapor deposition for semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Metal-line structure in integrated circuit and method of fabrica

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Metal-substituted transistor gates

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Metallization structure and method for a semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Metallization technique for gate electrodes and local...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and apparatus for a metallic dry-filling process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and apparatus for high performance transistor devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and apparatus for rapidly discharging plasma etched inter

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and apparatus to increase strain effect in a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and device for improved salicide resistance on...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and process to make multiple-threshold metal gates...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and structure for replaceable gate electrode in insulated

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method and structure for tungsten gate metal surface...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method employing silicon nitride spacers for making an...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method for a semiconductor device having reduced contact...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method for cleaning a substrate and cleaning solution

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method for cleaning the surface of a semiconductor wafer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method for containing a silicided gate within a sidewall...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method for controlling the amount of trim of a gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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