4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation
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Control of poly-Si depletion in CMOS via gas phase doping

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Control of two-step gate etch process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Control trimming of hard mask for sub-100 nanometer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Controlled linewidth reduction during gate pattern formation usi

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Conversion of amorphous layer produced during IMP Ti deposition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Cross-contamination control for processing of circuits...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Cross-contamination control for semiconductor process flows...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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CVD-based process for manufacturing stable low-resistivity...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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CVD-PVD deposition process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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