RF powered plasma enhanced chemical vapor deposition reactor and
RF powered plasma enhanced chemical vapor deposition reactor...
Room temperature wafer-to-wafer bonding by polydimethylsiloxane
Room temperature wet chemical growth process of SiO based oxides
RTCVD process and reactor for improved conformality and...
SABPSG process real temperature monitor
Sandwich composite dielectric layer yielding improved...
Selectable area laser assisted processing of substrates
Selective area halogen doping to achieve dual gate oxide thickne
Selective nonconformal deposition for forming low dielectric ins
Selective oxidation for semiconductor device fabrication
Selective oxidation methods and transistor fabrication methods
Selective oxidation methods and transistor fabrication methods
Selective passivation of exposed silicon
Selective plasma processing method
Selective plasma re-oxidation process using pulsed RF source...
Selectively growing a polymeric material on a semiconductor...
Self-aligned contact structures using high selectivity etching
Self-assembly process for memory array
Self-planarizing low-temperature doped-silicate-glass...