Selectable area laser assisted processing of substrates

Details Selectable area laser assisted processing of substrates Selectable area laser assisted processing of substrates

2007-08-07

2007-08-07

Alanko, Anita (Department: 1765)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C438S705000, C438S766000, C216S062000, C216S087000, C219S121730, C219S121780, C219S121850

Reexamination Certificate

active

10694392

ABSTRACT:
A system and method for selectable area laser treatment of a substrate, such as thin film transistors, the system including a holder holding a substrate in proximity to reactant, and laser beams each addressing independently selectable mutually set apart locations on the substrate to induce a reaction between the substrate and the reactant.

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