Silica-based film, method of forming the same, composition...
Silicon carbide cap layers for low dielectric constant...
Silicon carbide deposition for use as a low dielectric...
Silicon carbide deposition for use as a low-dielectric...
Silicon carbide having low dielectric constant
Silicon dioxide deposition methods using at least ozone and...
Silicon dioxide deposition methods using at least ozone and...
Silicon dioxide-oxynitride continuity film as a passivation...
Silicon germanium surface layer for high-k dielectric...
Silicon nitride and silicon dioxide gate insulator...
Silicon nitride and silicon dioxide gate insulator...
Silicon nitride deposition method
Silicon nitride deposition method
Silicon nitride deposition method for use in forming a memory ce
Silicon nitride film formation method
Silicon nitride film, and semiconductor device and method of...
Silicon nitride film, semiconductor device, and method for...
Silicon nitride films
Silicon nitride from bis(tertiarybutylamino)silane
Silicon nitride furnace tube low temperature cycle purge for...