Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate
2007-07-03
2007-07-03
Ghyka, Alexander (Department: 2812)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
C438S780000, C257SE21260
Reexamination Certificate
active
11172961
ABSTRACT:
Provided is a process for manufacturing an insulating film for a semiconductor device. The process includes preparing a composition for forming an insulating film, wherein the composition comprises a) an organosilicate polymer and b) an organic solvent. The composition is coated on a substrate of a semiconductor device to prepare a coated insulating film, and the coated insulated film is dried and cured. Also provided are an insulating film prepared as described as well as a semiconductor device comprising the insulating film.
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Choi Bum-Gyu
Kang Gwi-Gwon
Kang Jung-Won
Kim Young-Duk
Ko Min-Jin
Birch & Stewart Kolasch & Birch, LLP
Ghyka Alexander
LG Chem Ltd.
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