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Oxidation of silicon on germanium

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxidation of silicon using fluorine implant

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Oxidation process to improve polysilicon sidewall roughness

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxide film forming method

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxide film forming method

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxide superconductor thick film and method for manufacturing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Oxide/nitride stacked gate dielectric and associated methods

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Oxide/organic polymer multilayer thin films deposited by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Oxidizing method and oxidation system

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxidizing method and oxidizing unit for object to be processed

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxygen plasma reduction to eliminate precursor overflow in...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Oxygen plasma treatment for enhanced HDP-CVD gapfill

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Oxynitride GTE dielectrics using NH.sub.3 gas

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Ozone treatment method and ozone treatment apparatus

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Ozone-enhanced oxidation for high-k dielectric semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Ozone-teos method for forming with attenuated surface...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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