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Enhanced deposition control in fabricating devices in a...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Enhanced inspection of extreme ultraviolet mask

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Enhanced nitride layers for metal oxide semiconductors

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Enhanced nitride layers for metal oxide semiconductors

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Environmental control equipment/method of developing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Epitaxial and polycrystalline growth of Si1-x-yGexCy and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Epitaxial growth of relaxed silicon germanium layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Epitaxial wafer apparatus

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Etch back method for smoothing microbubble-generated defects in

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Etch stop layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Etch stop layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Etch stop layer for a metallization layer with enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Evaporated LaA1O3 films for gate dielectrics

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Exclusion of polymer film from semiconductor wafer edge and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Exposed pore sealing post patterning

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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