Plasma processes for depositing low dielectric constant films

Plasma processes for depositing low dielectric constant films

Plasma processing

Plasma thin-film deposition method

Plasma treatment of a semiconductor surface for enhanced...

Plasma treatment of a semiconductor surface for enhanced...

Plasma treatment of low dielectric constant dielectric...

Plasma-enhanced oxide process optimization and material and appa

Plural treatment step process for treating dielectric films

PMOS transistor with compressive dielectric capping layer

Poly(organosiloxane) materials and methods for hybrid...

Polyimide coating process with dilute TMAH and DI-water...

Polymeric dielectric layers having low dielectric constants and

Polymers and photoresist compositions for short wavelength...

Polyparaxylylene film, production method therefor and...

Porous dielectric material with improved pore surface properties

Porous insulating film, method for producing the same, and...

Porous materials

Porous organosilicates with improved mechanical properties

Porous silicon oxycarbide integrated circuit insulator