Carbon nanotube device and process for manufacturing same

Details Carbon nanotube device and process for manufacturing same Carbon nanotube device and process for manufacturing same

2007-01-30

2009-10-13

Dang, Trung (Department: 2892)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C977S743000

Reexamination Certificate

active

07601650

ABSTRACT:
The present invention contemplates a variety of methods and techniques for fabricating an improved carbon nanotube (CNT) device such as an AFM probe. A CNT is first formed on a desired location such as a substrate. The CNT and substrate are then covered with a protective layer through a CVD or other suitable process. Then a length of the CNT is exposed through etching or other suitable process, the exposed length being formed to a length suitable for a desired application for the CNT device.

REFERENCES:
patent: 6589835 (2003-07-01), Chang et al.
patent: 6759653 (2004-07-01), Nakayama et al.
patent: 6827979 (2004-12-01), Mirkin et al.
patent: 7033647 (2006-04-01), Tang et al.
patent: 7144287 (2006-12-01), Guillorn et al.
patent: 2002/0001970 (2002-01-01), Becker
patent: 2005/0191427 (2005-09-01), Wade et al.
patent: 2005/0208304 (2005-09-01), Collier et al.
patent: 2005/0260355 (2005-11-01), Weber et al.
patent: 2006/0233694 (2006-10-01), Sandhu et al.
patent: 2008/0272299 (2008-11-01), Jin et al.
Stevens et al., “Carbon Nanotubes As Probes For Atomic Force Microscopy,” Nanotechnlogy 2000, 11: 1-5.
Stevens et al., “Improved Fabrication Approach For Carbon Nanotube Probe Devices,” Appl. Phys. Lett. Nov. 2000, 77(21):3453-3455.
Delzeit et al., “Growth of Carbon Nanotubes by Thermal and Plasma Chemical Vapor Deposition Processes and Applications in Microscopy,” Nanotechnology 2002, 13:280-284.
Onaran et al., “A New Atomic Force Microscope Probe With Force Sensing Integrated Readout and Active Tip,” Review of Scientific Instruments 2006, 77:023501-1-023501-7.
PCT Search Report dated May 22, 2008.

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