Anisotropic etching of organic-containing insulating layers

Anisotropic, fluorine-based plasma etching method for silicon

Annealing furnace, manufacturing apparatus, annealing method...

Anti-corrosion system

Anti-reflective coatings and methods regarding same

Antireflection layer and process for lithographically structurin

Aperture in a semiconductor material, and the production and...

Apparatus and method for controlling etch depth

Apparatus and method for controlling plasma uniformity in a...

Apparatus and method for controlling wafer temperature in a...

Apparatus and method for improving uniformity in batch processin

Apparatus and method for optical interference fringe based...

Apparatus and method for plasma etching

Apparatus and method for plasma processing high-speed...

Apparatus and method for plasma treatment

Apparatus and method for pulsed plasma processing of a...

Apparatus and method for selectivity restricting process...

Apparatus and method using a remote RF energized plasma for...

Apparatus and methods for adjusting an edge ring potential...

Apparatus and plasma ashing process for increasing...