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Method for reducing particles during ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for removal of deposition on an optical element,...

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Method for repairing a pattern film

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for repairing a phase shift mask and a focused ion...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for sample preparation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for the adjustment of a semiconductor disc relative to a

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Method for the removal of a microscopic sample from a substrate

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for varying the diameter of a beam of charged particles

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Method for water vapor enhanced charged-particle-beam machining

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Method for writing a pattern on an object by a focused electron

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Method for writing a pattern using multiple variable shaped...

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Method of adjusting a lithography system to enhance image...

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Method of adjusting optical column in energy beam exposure syste

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Method of analyzing localized nonuniformities in luminescing mat

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Method of and an apparatus for charged particle beam exposure

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Method of and an apparatus for electron beam exposure

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Method of and apparatus for measurement and control of a gas...

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Method of and device for corpuscular projection

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method of and device for implanting ions in a target

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Method of and machine for pattern writing by an electron beam

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