4. Radiant energy
  5. Irradiation of objects or material
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One-step method for on-line lithographic pattern inspection

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Operationally positionable source magnet field

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Optical device and method of manufacture

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Optical heater for cryogenic ion implanter surface regeneration

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Optical instrument, and device manufacturing method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Optical switching in lithography system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Optical system having a cleaning arrangement

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Optics for generation of high current density patterned...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Overlapping boundary electron exposure system method and apparat

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