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E-beam control data compaction system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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E-beam exposure apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Electrical feed-through structure and method

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Electrical field enhanced electron image projector

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Electrically insulating vacuum coupling

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Electromagnetic focusing method for electron-beam...

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Electromagnetic regulator assembly for adjusting and...

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Electron beam apparatus and method of generating an electron...

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Electron beam apparatus having traversing circuit boards

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Electron beam apparatus, and inspection instrument and...

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Electron beam array lithography system employing multiple parall

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Electron beam blanking method and system for electron beam...

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Electron beam cell projection lithography method for correcting

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Electron beam column for writing shaped electron beams

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Electron beam column for writing shaped electron beams

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Electron beam column generator for the fabrication of semiconduc

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Electron beam column using high numerical aperture...

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Electron beam control method, electron beam drawing...

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Electron beam control method, electron beam drawing...

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Electron beam direct drawing device

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