4. Radiant energy
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Gas delivery for ion beam deposition and etching

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Gas flow restricting cathode system for ion implanter and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Gas shower, lithographic apparatus and use of a gas shower

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Gas supply unit, gas supply method and exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Geometric compensation method for charged particle beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Glass-like insulator for electrically isolating electrodes...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Grey-splice algorithm for electron beam lithography post-process

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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