Method of and device for corpuscular projection

Details Method of and device for corpuscular projection Method of and device for corpuscular projection

1980-10-30

1984-09-18

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 37302

Patent

active

044726368

ABSTRACT:
The invention relates to a method of and device for producing any desired patterns on a target. The irradiating beam is modulated over the entire cross-sectional area by an electro-magnetic field, which is obtained by a line or two-dimensionally shaped electrode grid, each individual electrode of which can be differently charged and which reflects the irradiation beam or produces a respective strip.

REFERENCES:
patent: 3278679 (1966-10-01), Newberry
patent: 3832561 (1974-08-01), O'Keeffe
patent: 4075488 (1978-02-01), Okayama et al.
patent: 4130761 (1978-12-01), Matsuda
patent: 4418283 (1983-11-01), Trotel

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