Charged-particle beam exposure apparatus and device...

Charged-particle beam instrument

Charged-particle beam instrument and method of detection

Charged-particle beam instrument and method of detection

Charged-particle beam lithography and cassette for material patt

Charged-particle beam optical apparatus including a damped suppl

Charged-particle optical system with dual loading options

Chatter detection in thickness measuring gauges and the like

Chemical analysis of defects using electron appearance...

Chemical etch solution and technique for imaging a device's...

Chemical prefiltering for phase differentiation via...

Cigarette density profile measurement system

Circuit for signal data obtained from an axial tomographic scann

Circuit pattern inspecting device and method and circuit pattern

Circuit pattern inspection method and its apparatus

Circuit scanning device and method

Cluster tool for microscopic processing of samples

Coarse adjusting device of scanning tunneling microscope

Coarse approach positioning device

Coated wafer holding pin