Charged-particle optical system with dual loading options

Details Charged-particle optical system with dual loading options Charged-particle optical system with dual loading options

2011-08-02

2011-08-02

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110, C250S441110, C977S854000, C310S012010

Reexamination Certificate

active

07989778

ABSTRACT:
A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.

REFERENCES:
patent: 5001350 (1991-03-01), Ohi et al.
patent: 5986270 (1999-11-01), Bormans et al.
patent: 6717156 (2004-04-01), Sugaya et al.
patent: 7034316 (2006-04-01), Wagner et al.
patent: 7291847 (2007-11-01), Morrison
patent: 7573047 (2009-08-01), Suzuki
patent: 2008/0073562 (2008-03-01), Suzuki
patent: 2008/0173813 (2008-07-01), Van de Water et al.
patent: 2008/0250881 (2008-10-01), Dona
patent: 2008/0283768 (2008-11-01), van Gaasbeek et al.
patent: 2009/0146075 (2009-06-01), Schmid et al.
patent: 2001-100038 (2006-04-01), None
patent: 2008051880 (2008-05-01), None

Affiliated with

Also associated with

Rating

Charged-particle optical system with dual loading options does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged-particle optical system with dual loading options, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged-particle optical system with dual loading options will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2691446