Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2007-11-27
2007-11-27
Fureman, Jared J. (Department: 2876)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S311000, C250S442110, C356S622000
Reexamination Certificate
active
11237475
ABSTRACT:
A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.
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Bormans Bernardus Jacobus Marie
Buijsse Bart
Meuwese Mark Theo
Slingerland Hendrik Nicolaas
Tappel Hendrik Gezinus
FEI Company
Fureman Jared J.
Griner David
Rojas Pedro A
Scheinberg Michael O.
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