Coarse approach positioning device

Details Coarse approach positioning device Coarse approach positioning device

1987-04-20

1988-08-09

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

2504421, 350530, 74470, 74479, G21K 510, G21K 508, H01J 3720

Patent

active

047629967

ABSTRACT:
This die-shaped coarse-approach positioning device is particularly suited for the sample holder of a scanning tunneling microscope or the like. It comprises two blocks (21, 23), one (21) stationary, the other tiltable with respect to the stationary one. The blocks (21, 23) are connected on one side by a spring-like sheet metal (20). The tiltable block (23) can be moved, and with it the sample (33), by turning a screw (28) which presses down onto an elastic pad (30). The tilting of the tiltable block (23) occurs against the effect of the sheet metal (20) until the block (23) touches down onto a wedge (39) insertable in the gap (24) between the blocks (21, 23), and consisting of an elastic material, however, having a spring constant much higher than the effective spring constant of the sheet metal (20). In the application shown, the sample can be lowered onto a tunnel tip (34) attached to a fine-approach positioning device (35).

REFERENCES:
patent: 3612863 (1971-10-01), Suzuki

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