Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2007-08-28
2007-08-28
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C252S079100, C252S079200, C252S079400, C156S345290
Reexamination Certificate
active
11028833
ABSTRACT:
The present invention provides, in one aspect, a method of imaging a microelectronics device100. The method comprises cleaning, when contaminants are preset, a sample of a microelectronics device100to be imaged with a first solution comprising hydrofluoric acid, an inorganic acid and water, exposing the sample to a second solution comprising hydrofluoric acid, an inorganic acid and an organic acid, wherein the second solution forms a contrast between different regions within the sample, and producing an image of the contrasted sample.
REFERENCES:
patent: 6666986 (2003-12-01), Vaartstra
Sheng, T. T., et al., “Delineation of Shallow Junctions in Silicon by Transmission Electron Microscopy,”Journal of the Electrochemical Society, vol. 128, No. 4, Apr. 1981, pp. 881-884.
Cerva, Hans, “Two-dimensional delineation of shallow junctions in silicon by selective etching of transmission electron microscopy cross sections,”J. Vac. Sci. Technol. B, vol. 10, No. 1, Jan./Feb. 1992, 3 pages.
Anciso Adolfo
Matheson Doug
Tsung Lancy Y.
Brady III W. James
McLarty Peter K.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
Vanore David A.
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