Charged-particle beam optical apparatus including a damped suppl

Details Charged-particle beam optical apparatus including a damped suppl Charged-particle beam optical apparatus including a damped suppl

1978-09-29

1980-09-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250440, G21K 506

Patent

active

042232244

ABSTRACT:
An improved charged-particle beam optical apparatus including a specimen holder which is mounted in at least one support member of the apparatus and vibrates when the support member is subjected to shock. The improvement of the invention comprises at least one damped supplemental oscillator coupled to the specimen holder at approximately the point of maximum vibration amplitude of the holder.

REFERENCES:
patent: 3521056 (1970-07-01), Suzuki
patent: 3628013 (1971-12-01), Heide
patent: 4058731 (1977-11-01), Muller et al.

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